WedgeTile™ & Minitile™

Designed for wide temperature ranges

  • Rigid ceramic and metal chassis
  • Integrated cable strain reliefs
  • High accuracy capacitance measurements
  • Low probe to probe capacitance for high accuracy CV measurements and for device characterization and modeling
  • -65°C to 300°C operating temperature ranges
  • 1 to 25 pins per site
  • Available in regular low leakage (5 femto amps per volt)
  • AttoFast™ with guarded tips for 2 femto amp per volt settling time

Each probe is designed for wide temperature ranges and so the probe expansion characteristics are closely matched to the wafer’s expansion characteristics. This allows the user to take a fast measurement while a system is in a settling or thermal stabilization mode and helps compensate for wafer expansion.

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