TS300-PCB

TS300-PCB – Testing on 300 mm Wafers and Large PCBs

TS300-PCB is MPI’s large, most versatile manual probe station offering testing on wafers up to 300 mm and large, up to 610 x 500 mm PCB boards. Besides MPI’s unique features, common for the manual probe systems such as the air-bearing stage or the Probe Hover Control PHC™, it incorporates a specially designed probe platen and large microscope movement in order to cover a large probing area. These features make the system an ideal choice to address both RF, mmW, Signal Integrity measurements and Failure Analysis, Design Validation applications.

Air-Bearing Stage

The MPI unique air-bearing stage design, with simple single-handed puck control, provided unsurpassed convenience of operation for fast XY navigation and quick wafer loading without compromising accurate and fine positioning capability with the additional fine and accurate 25×25 mm XY-Theta micrometer movement.

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Unique Platen Lift with Probe Hover Control™

The highly repeatable (1 µm) platen lift design with three discrete positions for contact, separation (300 µm), and loading (3 mm) with a safety lock utility are all examples of unparalleled functionality incorporated into MPI TS300-PCB manual probe system. These features prevent unexpected probe or wafer damage while providing intuitive control, accurate contact positioning, and safety set-up. This capability is especially critical if probes in mmW and sub-THz range are so cost intensive.
Additional Probe Hover Control™ comes with hover heights (50, 100 or 150 µm) for easy and convenient probe to pad alignment.

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Dedicated Probe Platen

TS300-PCB offers a standard 20 mm probe platen height movement and rectangular or arbitrary adjustments for MPI RF MicroPositioners providing TDR impedance, S-parameters, cross-talk, broadband S-parameter measurements up to 220 GHz. In combination with the large microscope movement and the special PCB holder, the platen design makes the system capable for probing over an expanded area of 20” x 18” (500 x 460 mm).

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PCB Holder

TS300-PCB can accommodate a variety of ambient or 300 mm PRIME thermal chucks and/or a large holder for printed circuits board’s sizes up to 24” x 20”(610 mm x 500 mm). The dedicated PCB holder can be used for probing on smaller boards down to 2”x 2” (50 mm x 50 mm) or up to packaged ICs and incorporates two AUX chucks made of ceramics for accurate RF calibration in the mmW range.

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MPI SENTIO® for Manual Probe Systems

By using a novel approach based on simplicity and truly intuitive operation, MPI was first to develop a revolutionary multi-touch prober control software suite to address today’s challenges of operating complex probe test systems.
This SENTIO® option enables the capability for MPI manual probe stations, such as to combine a programmable microscope stage for automated navigation of probing on mini pads or even programmable MicroPositioners for automated RF calibration.

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