Keithley Instruments – Measurement Solutions by ATV Systems

As an authorized distributor of Keithley Instruments (a Tektronix Company), ATV Systems GmbH offers the complete Keithley product portfolio for semiconductor test and measurement – from precision low-current and small-signal measurements to high-power characterization at up to 3 kV and 100 A. Combined with MPI Corporation's wafer probe systems and our proprietary test software Measmatic™, we deliver turnkey measurement systems precisely tailored to your requirements.

Why Choose Keithley Instruments from ATV Systems?

Keithley Source Measure Units form the measurement backbone of most ATV test systems. Unlike a standalone instrument purchase, ATV provides a fully integrated solution: we select the right Keithley instrumentation for your application, integrate it into a complete test solution, and control everything through our test software Measmatic™. This drastically reduces your time to first measurement and ensures reliable, repeatable results from day one.

A key advantage: Measmatic™ leverages Keithley's TSP® technology (Test Script Processor) and executes LUA scripts directly on the embedded processor of Keithley instruments. This enables maximum measurement throughput with precise timing – a decisive advantage for pulsed measurements and production testing.

Unsere Applikationsbereiche

Device Characterization – Precision Measurements in the Low-Current and Small-Signal Domain

For semiconductor device characterization, we offer measurement solutions that precisely capture the smallest currents and voltages. For comprehensive parametric analysis, we deploy the Keithley 4200A-SCS, Keithley's flagship parameter analyzer with up to 8 SMU modules, integrated C-V and pulsed IV – integrated into an MPI probe system with ShielDEnvironment™, you achieve reproducible measurements in the femtoampere range.

Typical applications: IV/CV characteristics, transistor and diode characterization, leakage current measurements (gate, drain, junction), breakdown voltage measurements, threshold voltage determination (Vth), process control monitoring (PCM), Wafer Acceptance Testing (WAT), MOSFET parametrics, oxide quality testing

Typical Keithley instruments: 2636B (Low-Current SMU, 100 fA), 2612B (General-Purpose SMU), 2606B (4-Channel SMU), 4200A-SCS (Parameter Analyzer), 3706A (Switching Matrix)

High-Power Semiconductor Testing – High Voltage up to 3 kV, High Current up to 100 A

Characterizing power semiconductors such as SiC MOSFETs and GaN HEMTs demands exceptional voltage, current, and safety capabilities. Our high-power measurement solutions are built on Keithley high-performance SMUs – the 2657A for voltages up to 3,000 V and the 2651A for currents up to 100 A DC. Combined with our ATV Power Test Platform (PTP), we offer a turnkey solution that unifies IV and CV measurements in a single automated run – no rewiring, no multiple wafer passes.

Typical applications: RDS(on) measurements, breakdown voltage testing (BV), drain leakage measurements, transfer and output characteristics (DC and pulsed), gate charge (Qg), dynamic RDS(on) for GaN trapping analysis, Ciss/Coss/Crss capacitance measurements at high DC bias, threshold voltage measurement per JEDEC JESD 28A/60A

Typical Keithley instruments: 2657A (High-Voltage SMU, 3 kV), 2651A (High-Current SMU, 20 A DC / 100 A pulsed), 2612B (Gate SMU), PCT-CVU (Capacitance-Voltage Unit)

Switching and Multi-Channel Systems

For complex test setups with numerous measurement points, we integrate Keithley switching systems that enable automated routing between different DUT pins and measurement channels. TSP-Link® technology connects multiple Keithley SMUs into a synchronized multi-channel system – without an external mainframe, with seamless Measmatic™ integration.

Typical Keithley instruments: 3706A (System Switch/Multimeter), 707B (Switching Matrix), TSP-Link interconnect cables for multi-SMU systems

Our Services

Consulting and System Configuration

Our application engineers analyze your measurement requirements and recommend the optimal Keithley instrumentation – from a single-channel SMU for basic IV measurements to a fully configured multi-SMU system with automated switching and C-V measurement.

System Integration and Validation

We integrate Keithley instruments into MPI wafer probe systems and validate overall performance against agreed acceptance criteria. Every system is thoroughly tested prior to delivery – including correlation measurements and documentation.

Measmatic™ Software Integration

Our test software Measmatic™ provides native drivers for all common Keithley instruments. From interactive engineering measurements to fully automated production testing, you use a single software platform – no software migration required when transitioning from lab to production. For the ATV Power Test Platform, we deliver pre-configured test projects with all standard power device tests.

Installation, Training and Support

We install the system at your facility, train your operators, and provide fast technical support as your local partner based in Dresden, Germany. For calibration needs, we support you with Keithley instruments that are serviceable worldwide through the Tektronix service network.

ATV Power Test Platform – Our Flagship with Keithley Instrumentation

The ATV Power Test Platform (PTP) is the prime example of deep Keithley instrumentation integration into a turnkey test system. It unifies IV, CV, and high-current measurements in a single automated run on an MPI wafer probe system – controlled by Measmatic™. The PTP is built entirely on Keithley SMUs (2657A, 2651A, 2612B) and the PCT-CVU, integrated into a proprietary ATV HVC switch with low-leakage design (< 50 fA/V). This eliminates manual rewiring between IV and CV measurements, resulting in a substantial increase in system throughput.